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Kiyoshi Matsumoto

    Department of Mechanical Engineering　Professor
    Research Institute of Industrial Technology　Researcher
    Course of Advanced Mechatronics Systems　Professor
Last Updated :2024/04/23

Researcher Information

URL

Research funding number

  • 10282675

J-Global ID

Research Interests

  • 知能機械システム   力覚センサ   MEMS   3次元微細構造   触覚センサ   人間機械システム   熱流速センサ   SPR   知能化金型   ネガティブコンプライアンス   

Research Areas

  • Informatics / Mechanics and mechatronics
  • Informatics / Robotics and intelligent systems
  • Manufacturing technology (mechanical, electrical/electronic, chemical engineering) / Machine elements and tribology
  • Manufacturing technology (mechanical, electrical/electronic, chemical engineering) / Design engineering
  • Manufacturing technology (mechanical, electrical/electronic, chemical engineering) / Manufacturing and production engineering
  • Nanotechnology/Materials / Nano/micro-systems

Academic & Professional Experience

  • 2016 - Today  Toyo University教授
  • 2006 - 2016  The University of Tokyo教授
  • 2000 - 2006  The University of Tokyo助教授
  • 1995 - 2000  The University of Tokyo助手
  • 1987 - 1995  日立製作所 中央研究所 研究員

Education

  • 1985/04 - 1987/03  東京大学大学院  工学系研究科  産業機械工学専攻
  • 1980/04 - 1985/03  The University of Tokyo  The Faculty of Engineering  Department of Mechanical Engineering

Association Memberships

  • THE JAPAN SOCIETY OF APPLIED PHYSICS   THE SOCIETY OF INSTRUMENT AND CONTROL ENGINEERS   THE ROBOTICS SOCIETY OF JAPAN   THE JAPAN SOCIETY OF MECHANICAL ENGINEERS   

Published Papers

Books etc

  • 畑村洋太郎編著; 実際の設計研究会著 (Joint work)日刊工業新聞社 2017/03 9784526076794 xvi, 470p
  • 松本 潔; 実際の設計研究会 (Single work)日刊工業新聞社 2015/02 4526073601 328
  • 実際の設計 改訂新版 機械設計の考え方と方法
    畑村洋太郎編著; 実際の設計研究会著 (Joint work)2014
  • 実際の設計 第7巻 成功の視点
    畑村洋太郎編著; 実際の設計研究会著 (Joint work)2010
  • マイクロ・ナノ熱流体ハンドブック
    マイクロ・ナノ熱流体ハンドブック編集委員会 (Joint work)2006
  • 実際の設計 第６巻 技術を伝える
    畑村洋太郎編著; 実際の設計研究会著 (Single work)2006
  • 実際の設計 第５巻 こう企画した
    畑村洋太郎編著; 実際の設計研究会著 (Joint work)2004
  • 実際の設計 第４巻 こうして決めた
    畑村洋太郎編著; 実際の設計研究会著 (Joint work)2002
  • The Principle of Machine Design
    edited by; Y. Hatamura; written by; Institute of; Creative Design (Joint work)1999
  • 実際の情報機器技術 情報機器の原理・設計・生産・将来
    畑村洋太郎; 中尾政之編著 (Joint work)1998
  • 続々・実際の設計 失敗に学ぶ
    畑村洋太郎編著; 実際の設計研究会著 (Joint work)1996
  • 東京大学機械工学１ 情報機器技術
    畑村洋太郎編 (Joint work)1993
  • 設計の原理－創造的機械設計論－
    NPスー著; 畑村洋太郎監訳 (Joint translation)1992
  • 続・実際の設計 機械設計に必要な知識とデータ
    畑村洋太郎編著; 実際の設計研究会著 (Joint work)1992

Conference Activities & Talks

  • 高畑智之; 松本潔; 下山勲
    日本ロボット学会学術講演会予稿集(CD-ROM)  2015/09
  • NGUYEN Thanh‐Vinh; 高橋英俊; 松本潔; 下山勲
    電気学会フィジカルセンサ研究会資料  2015/07
  • 竹井裕介; 鈴木智絵; 野田堅太郎; 高畑智之; 松本潔; 下山勲
    電気学会バイオ・マイクロシステム研究会資料  2015/05
  • 海法克享; 高橋英俊; 富松大; 小林健; 松本潔; 下山勲; 伊藤寿浩; 前田龍太郎
    精密工学会大会学術講演会講演論文集  2015/03
  • 菅哲朗; 磯崎瑛宏; 神田夏輝; 根本夏紀; 小西邦昭; 五神真; 松本潔; 下山勲
    応用物理学会春季学術講演会講演予稿集(CD-ROM)  2015/02
  • 磯崎瑛宏; 高橋英俊; 田村洋人; 高畑智之; 松本潔; 下山勲
    応用物理学会春季学術講演会講演予稿集(CD-ROM)  2015/02
  • TAKEI Yusuke; TANAKA Ryohei; NAKAI Akihito; TAKAHATA Tomoyuki; MATSUMOTO Kiyoshi; SHIMOYAMA Isao
    Symposium on sports and human dynamics  2014/10 
    In this research, we measured the force acting on tip of the finger when rugby player throwing spin pass. We put five sensors on the fingers. The sensor can measure three axis force (pressure and two axis shear force). Three examinee, which rugby experiences were varied from 13years to none-experience, threw spin passes three times each and the ball moving speed and rotating speed were measured. From the data analysis, 13-years-experienced rugby player threw the ball concentrating the force in 0.04 seconds just before releasing the ball to increase the rotating speed.
  • TAKAHASHI Hidetoshi; MATSUMOTO Kiyoshi; SHIMOYAMA Isao
    Mechanical Engineering Congress, Japan  2014/09 
    This paper reports on measurement of ground reaction forces (GRFs) of ant legs during running on level ground, vertical wall and ceiling. Micro force plate array is designed and fabricated to measure anterior and vertical directional forces. Thus, GRF of all legs in the various ground angles can be detected simultaneously. The size and force resolution are 2000 μm × 1000 μm × 20 μm and 1 μN, respectively. The measurement results show that ants use different GRF distribution in three types of terrestrial locomotion. In every types of locomotion, the ant was affected by the gravity reaction force, which was totally equal to the body weight. The gravity reaction force was approximately equal to each leg during running on level ground and ceiling. The gravity reaction force during ceiling was thought to be generated by the adhesion force of sub-micron scale hairs on the tip of the legs. The measured GRF distribution clarified that ants use the different strategies of running mechanism depending on the angle of the ground against the horizon plane.
  • 菅哲朗; 松本潔; 下山勲; 安食嘉晴
    電気学会マイクロマシン・センサシステム研究会資料  2014/05
  • 磯崎瑛宏; 菅哲朗; 高橋英俊; 根本夏紀; 小西邦昭; 五神真; 松本潔; 下山勲; 神田夏輝
    電気学会マイクロマシン・センサシステム研究会資料  2014/05
  • KAZAMA Ryohei; TAKAHASHI Hidetoshi; HIRAKAWA Shinnosuke; TAKAHATA Tomoyuki; MATSUMOTO Kiyoshi; SHIMOYAMA Isao
    ロボティクス・メカトロニクス講演会講演概要集  2014/05 
    We measured the differential pressures of an ornithopter whose stroke trajectory was a figure of eight. Simultaneously, we visualized the flow around wing surface, and analyzed the differential pressures to connect it. To measure the pressure, we attached a MEMS differential pressure sensor on the wing surface. We designed the ornithopter which could operate a flapping motion and a lead-lag motion at the same time. The ornithopter worked by an electric motor and its flapping frequency was 6-8 Hz. The consequence of this experiment suggests that the peak of the differential pressures and the vortex around wing surface occuur at the same time during the flapping.
  • Ishido Hiroshi; Hori Masataka; Nakai Akihito; Takahata Tomoyuki; Matsumoto Kiyoshi; Shimoyama Isao
    ロボティクス・メカトロニクス講演会講演概要集  2014/05 
    In this paper, we report a method to measure the force of a spike pin in running. To measure the force of the spike pin, we fabricated a spike-pin-shaped sensor using MEMS (Micro Electro Mechanical Systems) 3-axis force sensor chip. The sensor consisted of a 2 mm square 3-axis force sensor chip and spike-pin-shaped epoxy resin which covered the sensor chip. The sensor was attached on a position of big toe on the right spike shoe to measure 3-axis forces when the subject was walking at 4.0 km/h and 5.2 km/h, and running at 9.2 km/h. Among 3-axis forces, the vertical component was the largest, the propulsive component was second largest, and left-right component was the smallest. The direction of impulse was upward, forward, and leftward. The faster the gait speed was, the larger the resultant force was.
  • AOKI Ryo; KANEKO Tomonori; Minh-Dung Nguyen; TAKAHATA Tomoyuki; MATSUMOTO Kiyoshi; SHIMOYAMA Isao
    ロボティクス・メカトロニクス講演会講演概要集  2014/05 
    We have proposed the high sensitive device that can detect high frequency spectrum of mechanomyogram. The study of high frequency spectrum of mechanomyogram has been superficial because such a sensitive transducer has never been developed. Acoustic impedance matching and a differential pressure sensor are the key to solve this problem. We fabricated two sensors to compare frequency characteristic, one with acoustic impedance matching and the other without it. The result of the experiment was that SN ratio of the sensor with acoustic impedance matching was about up to 700 times larger than that of the sensor without acoustic impedance matching. In addition to this, we were able to measure mechanomyogram using the sensor with acoustic impedance matching and found that up to approximately 1 kHz spectrum of mechanomyogram was detected.
  • Ohkado Makoto; Fujikawa Hisayoshi; Noda Kentaro; Nguyen Binh-Khiem; Matsumoto Kiyoshi; Shimoyama Isao
    Proceedings of the IEICE General Conference  2014/03
  • 大門真; 藤川久喜; 野田堅太郎; BINH‐KHIEM Nguyen; 松本潔; 下山勲
    電子情報通信学会大会講演論文集(CD-ROM)  2014/03
  • 磯崎瑛宏; 菅哲朗; 高野恵介; 萩行正憲; 松本潔; 下山勲
    応用物理学会春季学術講演会講演予稿集(CD-ROM)  2014/03
  • 海法克享; 高橋英俊; 富松大; 小林健; 松本潔; 下山勲; 伊藤寿浩; 前田龍太郎
    精密工学会大会学術講演会講演論文集  2014/03
  • 竹井裕介; 田中遼平; 中井亮人; 高畑智之; 松本潔; 下山勲
    日本機械学会シンポジウム:スポーツ・アンド・ヒューマン・ダイナミクス(CD-ROM)  2014
  • 海法克享; 高橋英俊; 富松大; 小林健; 松本潔; 下山勲; 伊藤寿浩; 前田龍太郎
    センサ・マイクロマシンと応用システムシンポジウム(CD-ROM)  2014
  • 磯崎瑛宏; 菅哲朗; 高橋英俊; 松本潔; 下山勲
    センサ・マイクロマシンと応用システムシンポジウム(CD-ROM)  2014
  • 竹井裕介; 青木亮; 金子智則; 松本潔; 下山勲
    センサ・マイクロマシンと応用システムシンポジウム(CD-ROM)  2014
  • 野田 堅太郎; 松本 潔; 下山 勲
    「センサ・マイクロマシンと応用システム」シンポジウム論文集 電気学会センサ・マイクロマシン部門 [編]  2013/11
  • 高畑 智之; 松本 潔; 下山 勲
    「センサ・マイクロマシンと応用システム」シンポジウム論文集 電気学会センサ・マイクロマシン部門 [編]  2013/11
  • NAKAI Akihito; NAGANO Akinori; TAKAHASHI Hidetoshi; MATSUMOTO Kiyoshi; SHIMOYAMA Isao
    Symposium on sports and human dynamics  2013/11 
    We proposed a wireless measurement system of 3-axis stress distribution at a human sole by using small and thin 3-axis force sensors. The sensor chips 2mm square made by using MEMS (Micro Electro Mechanical Systems) technologies were mounted on the flexible printed circuit board, wire-bonded and buried in silicone rubber by injection molding to fabricate 3-axis force sensors. After the calibration for crosstalk compensation, these sensors were placed on the insole at the heel, thenar and hypothenar. The 3-axis stress distribution was measured in going up and down stairs. The output signals from sensors were amplified 100 times with Wheatstone bridges and differential amplifiers, converted to digital signals and wirelessly transmitted to PC with a Bluetooth module on the CPU board. Measured data which comprised pressure, shear stress of front-back direction and shear stress of lateral direction were compared with the data in level walking, and were consistent with the somatic sensation of the human subject.
  • TAKEI Yusuke; NODA Kentaro; KAWAI Toshihiro; TACHIMURA Takashi; TOYAMA Yoshio; TAKAI Megumi; MATSUMOTO Kiyoshi; SHIMOYAMA Isao
    Symposium on sports and human dynamics  2013/11 
    In this research, we fabricated triaxial force sensors which can measure tongue activities. In order to analyze the role of tongue activity of front part (anterior tongue) and back part (posterior) of the tongue, we fixed two triaxial force sensors to the palate. Our triaxial force sensors also have temperature sensors, which can measure the temperature change in the mouth so that temperature drift of the force sensors output can be compensated. In the liquid-swallowing experiment, pressure and shear force distributions were observed to clarify tongue motion. We measured and calculated anterior and posterior tongue activities during swallowing, and found that anterior tongue activity was larger than posterior tongue activity. These results indicated that the anterior tongue works as an anchor and the posterior tongue works as an actuator which transports the food or liquid to the throat.
  • 田村洋人; 高橋英俊; 高畑智之; 松本潔; 下山勲
    電気学会フィジカルセンサ研究会資料  2013/08
  • 鈴木崇大; 市川安孝; 高畑智之; 松本潔; 下山勲
    電気学会マイクロマシン・センサシステム研究会資料  2013/08
  • 松井一真; 稲葉亮; 竹井裕介; 高畑智之; 松本潔; 下山勲
    電気学会マイクロマシン・センサシステム研究会資料  2013/08

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Awards & Honors

  • 2016/01 IEEE MEMS2016 Outstanding Student Paper Award Finalist
     Measurement of jumping force of a fruit fly using a mesa structured force plate 
    受賞者: 古谷龍;高橋英俊;グェンタンヴィン;矢野朋子;伊藤啓;高畑智之;松本潔;下山勲
  • 2015/10 電気学会 電気学会センサ・マイクロマシン部門平成27年度総合研究会優秀論文発表賞
     液滴の滑りメカニズムを解明するためのMEMS力センサ 
    受賞者: グェンタンヴィン;高橋英俊;松本潔;下山勲
  • 2015/04 電気学会 電気学会優秀論文発表賞
     金回折格子によるSPRを用いた近赤外Siディテクタアレイ 
    受賞者: 菅哲朗;安食嘉晴;松本潔;下山勲
  • 2014/06 電気学会 電気学会センサ・マイクロマシン部門平成26年度総合研究会優秀論文発表賞
     サブミクロンギャップを有するMEMS可変メタマテリアルの製作と設計 
    受賞者: 磯崎瑛宏;菅哲朗;高橋英俊;根本夏紀;小西邦昭;五神真;松本潔;下山勲
  • 2013 日本時計学会青木賞
     分光画像計測のための可変波長マイクロ光フィルタの設計 
    受賞者: 土肥徹次;松本潔;下山勲
  • 2009 Best Paper Award
     Nano-Mechanical Structure Fabrication Technology for Highly Integrated, Complex MEMS 
    受賞者: Tetsuo Kan;Yusuke Takei;Hiroaki Onoe;Eiji Iwase;Tetsuji Dohi;Kiyoshi Matsumoto;Isao Shimoyama
  • 2006 IEEE Lasers and Electro-Optics Society LEOS-Newport/Spectra-Physics Annual Student Paper Awards First Place
     Mechanical Tuning of 2D Photonic Crystal with MEMS-based Electrostatic Actuator 
    受賞者: Tomoyuki Takahata;Kiyoshi Matsumoto;Isao Shimoyama

Research Grants & Projects

  • Japan Society for the Promotion of Science：Grants-in-Aid for Scientific Research
    Date (from‐to) : 2015 -2017 
    Author : Matsumoto Kiyoshi
     
    In this research, in order to measure slipperiness of objects, a local slip generation mechanism using a soft elastic material was studied. By combining this mechanism with a 3-axial tactile sensor for pressure and shear forces in two directions, friction coefficient sensors that measure the friction coefficient of the contact surface in 2-axial directions were proposed. A friction coefficient sensor with fine structures of nylon tegus and that with an elastic bump were developed, and by these sensors, detection capability of friction coefficient was confirmed. As detection mechanism with nonlinear sensitivity characteristics, a cantilever structure with variable rigidity controlled by Lorentz force was evaluated. For further applications, a foot structure for robots and a tire for cars that can detect friction coefficient and slip with road surface were developed.
  • Japan Society for the Promotion of Science：Grants-in-Aid for Scientific Research
    Date (from‐to) : 2014 -2016 
    Author : Matsumoto Kiyoshi; FUJIKAWA Hisayoshi; OOKADO Makoto; NOMURA Tsuyoshi
     
    In this study, to control wavefront of THz-waves or millimeter-waves, a device which can control distribution of the dielectric constant by dynamically deforming the shape of the dielectric liquid was proposed. By using MEMS technology, a liquid actuator device with flow channels which can deform the thickness of liquid was developed. The wave-front’s deformation was analyzed and confirmed that waves can be deflected or converged by the permittivity distribution. As application devices, a variable focus ultrasonic lens and a wave-front control device with fine structures were developed.
  • Japan Society for the Promotion of Science：Grants-in-Aid for Scientific Research
    Date (from‐to) : 2012 -2014 
    Author : MATSUMOTO Kiyoshi
     
    In this study, based on the characteristics of the human tactile receptors, the research and development of MEMS tactile sensors with wide dynamic range were carried out. The tactile sensor encapsulated with piezoresistive cantilevers in silicone oil showed a differential response against applied forces, and was able to detect small component of the forces with high sensitivity. The tactile sensor with a pyramidal or bump structure showed the characteristic of high sensitivity for small forces together with low sensitivity for large forces. These tactile characteristics are similar to those of the human, and effective to expand the dynamic range of force detection.
  • Ministry of Education, Culture, Sports, Science and Technology：Grants-in-Aid for Scientific Research(基盤研究(B))
    Date (from‐to) : 2011 -2013 
    Author : Kiyoshi MATSUMOTO
     
    In this study, by using the method of depositing organic film directly on liquid surface, the research and development of micro devices with liquid as functional elements were carried out. For the establishment of the depositing technology, a method of controlling the permeability of material by the thickness of the film, and a method of depositing the film on the liquid-impregnated beads under vibrating field were developed. For the application devices, the functional micro beads for measurement of micro environment, the gas sensors with ionic-liquid-gate transistors, and the underwater ultrasonic transmission devices by thermal acoustic generation were developed.
  • Ministry of Education, Culture, Sports, Science and Technology：Grants-in-Aid for Scientific Research(基盤研究(A))
    Date (from‐to) : 2010 -2013 
    Author : Isao SHIMOYAMA; Kiyoshi MATSUMOTO; Tetsuo KAN; Yusuke TAKEI; Kentaro NODA; Hidetoshi TAKAHASHI
     
    In this project, a triaxial MEMS force sensing cantilever was studied. The sensor is equipped with a piezoresistor for force sensing at the root of the cantilever so that a quantitative mechanical stimuli could be applied to biological cells. The MEMS cantilever was made from an SOI wafer. A piezoresistive layer was formed by thermal diffusion on the surface of either cantilever root or the sidewall of the beam structure so that the corresponding three dimensional forces can be detected simultaneously. The resolution of the measurable force was as small as 1 uN for all the three directional forces, and the triaxial force could be independently measured with the device.
  • Ministry of Education, Culture, Sports, Science and Technology：Grants-in-Aid for Scientific Research(基盤研究(A))
    Date (from‐to) : 2005 -2008 
    Author : Isao SHIMOYAMA; 星野 一憲; 松本 潔
     
    機能性膜タンパクであるバクテリオロドプシンとMEMSを融合することにより、光センサアレイを実現した。実現した光センサは、低温プロセスによりプラスチックフィルム上に製作でき、低コストで柔軟であるという特徴を持つ。本研究を実現する過程で、膜タンパクの選択的パターニング技術の確立、膜タンパクと低温有機材料プロセスの両立、印刷技術によるパターニング技術の確立を実現した。平面の状態だけでなく曲げた状態で光画像パターンを検出でき、柔軟な光センサアレイとしての機能を持つことを示した。
  • 文部科学省：科学研究費補助金(基盤研究(B))
    Date (from‐to) : 2006 -2007 
    Author : 松本 潔
     
    平成18年度は、シリコンを材料としたMEMS構造と近赤外光を用いたSPRセンサの基本特性評価、SPR角検出方法の検討を行なった。■シリコン構造と近赤外光を用いたSPRの基本特性評価a)可視光とBK7プリズム、b)近赤外光とBK7プリズム、C)近赤外光とシリコンプリズム、の3つの組み合わせでのSPR曲線を数値計算によって求めた。可視光の波長は630nm、近赤外光は1550nmとした。分解能を評価するための指標として、水を試料としたときのSPRディップの半値幅wを,水とエタノールのSPR角の差で割った値を用いた。その結果、a)では1.60であった値が、b)、c)ではそれぞれ0.072、0.083となり、近赤外光を用いることで高分解能のSPRセンサが実現できることが確認できた。さらに実際にBK7プリズムとシリコンプリズムを用い、水とエタノールを試料として近赤外SPR計測を行った。試料の誘電率変化によって理論通りにSPR角が変化することを確認した。■角度スキャン機構部および検出方式の検討入射角走査方法として、ローレンツ力で駆動するフラップを検討した。さらにフラップと小型シリコンプリズムセンサを一体化した小型SPRセンサを実現した。また表面ナノ構造によって励起される1次SPR角がナノ構造のピッチによって制御可能であることを見出し、センサとしての利用方法を提案した。実際にシリコンプリズムSPRセンサの厚さ280μmの金膜表面に、厚さ100nm、ピッチ430nmのグレーティング構造を形成することで、1次SPRを利用したSPRセンサを実現した。
  • 文部科学省：科学研究費補助金(萌芽研究)
    Date (from‐to) : 2005 -2006 
    Author : 星野 一憲; 下山 勲; 丸山 茂夫; 松本 潔
     
    カーボンナノチューブの成長方向・量を制御する要因として,電界の方向のほかに,ガスの流れ方向および流速が考えられる。望ましい位置にカーボンナノチューブを成長させる方法の一つとして,MEMS微細構造を利用した流れ制御が有効であると考えられる。シリコン基板上に微細流路をつくり,流路幅の変化によって流速を制御し,カーボンナノチューブ成長量と流速の関係を調べた。その結果,流速が早いほど,カーボンナノチューブの成長は活発になるが,流路壁面に成長するナノチューブの成長方向とガス流れ方向の間には顕著な相関がないことが明らかになった。ここでは,通常の流体と希薄気体と境界にあたる流れ条件を与える反応管内で実験を行った。ここで,反応ガスの圧力を下げ,希薄気体としての仮定が成立する条件で反応を行なえば,壁面におけるすべりが生じるため,ガス方向とナノチューブ成長方向との間の関係が観察されるようになる可能性がある。また,カーボンナノチューブ成長をリアルタイムで計測するための微小カンチレバーを製作し,反応炉をピエゾアクチュエータによって外部から加振することによって内部のカンチレバーの振動の周波数応答を計測することができた。これにより,カンチレバー自体に静電アクチュエータなどの駆動方法を集積することなく計測環境が得られることがわかった。これにより,製作可能なカンチレバー特性の自由度が大幅に増し,様々なカーボンナノチューブの成長条件に適したカンチレバーを製作することができる。
  • 文部科学省：科学研究費補助金(萌芽研究)
    Date (from‐to) : 2005 -2006 
    Author : 市川 保正; 下山 勳; 星野 一憲; 松本 潔
     
    本研究の目的は,外場を用いてマイクロ粒子を操作し,リボソームの機能発現を制御する事にある.このために,前年度までの基礎実験の結果を基に実験装置の設計製作を行い,実際にPHなどを制御する実験系の構築を行った.これによって,試験溶液として生体由来物質(脂質等),ナノ粒子,イオン溶液などを含むものを用い,濃縮・濃度調整を行うことが可能になった.また,構築した顕微鏡システムを用いて,リボソームの破膜がUV照射により可能なことを実験的に確かめ,マイクロチャンバー内で破膜の実験を行った.この結果,実際に内包したインクの漏洩を確認し,破膜制御が可能であることを明らかにした.さらに,ジャイアントリポソームの調製技術を確立し,小胞リポソーム,ナノ粒子,蛍光粒子,インクなどを内包させ置換によって外部溶液と異なるように制御する方法も確立した.これらの成果を基にして,複数のリポソームに異なる溶液を内包させ,これをマイクロチャネル内のチャンバーにおいて会合させ破膜・混合させる実験を行っており成果の一部を本年10月のμTASの国際会議(in Paris, FRANCE on 7-11 October 2007.)において公表する予定である.(投稿中)以上の本年度の研究によって機能性リボソームの調整に対する研究の基礎的な部分はほぼ予定通り終了した.今後の課題としては,時間的制約によって十分に進展しなかった,マイクロ構造物の内包と表面にナノ粒子を吸着させる実験が残っているが,試験設備を利用してさらに発展させる予定である.
  • 文部科学省：科学研究費補助金(萌芽研究)
    Date (from‐to) : 2004 -2005 
    Author : 下山 勲; 松本 潔; 星野 一憲
     
    本研究では、構造色の発色メカニズムを解明し、構造色の発色構造を再構築する。さらにMEMS技術を用いて、波長可変の発色機構を構築することを目的とする。平成16年度には、構造色の発色メカニズムの解明、構造色発色の評価手法の開発、および基本的な微細構造を用いた構造色の再構成を行なった。これを踏まえて平成17年度は、構造の制御により発色波長を変えられる可変構造色MEMSデバイスの試作を行った。・発色波長可変方法の検討波長オーダーの微細構造により構造色の再構成を実現できるが、構造の変形によって発色波長を変化させる方法では10%以上の変形が必要なため非常に困難である。一方、多層構造で隣り合う層の材質を変えることによって、バイステイブルな可変発色が可能である。これはディスプレイなどへの応用にも有用な方法である。表面の微細発色構造部にPDMSを接触させることで発色波長をバイステイブルに変化させる方法を実現し、評価を行った.・可変構造色MEMSデバイスの試作上下方向に可動するMEMSアクチュエータと組み合わせることにより、上部に配置したPDMS層との接触・非接触制御する可変構造色MEMSデバイスを試作した。1ドットを1mm角とした可変発色体をドッドマトリックス状に配置し、市松模様などいくつかのパターンの表示を実現した。これにより、構造色がMEMS技術を用いることで、高輝度・低消費電力な反射型ディスプレイへの応用展開が可能であることを示した。
  • 文部科学省：科学研究費補助金(萌芽研究)
    Date (from‐to) : 2003 -2004 
    Author : 松本 潔; 福田 勝己; 下山 勲
     
    本研究の目的は、表面修飾した微細なパーツを用い、それを順序だてて組み立てて、任意の3次元構造体を作成する手法を探索することである。3次元構造の材料となる微小パーツとしては、シリコン基板を半導体プロセスにより加工し、直径10um程度の円柱形状を作成した。円柱の片面に金膜を蒸着し、さらにその上に自己組織化単分子膜(SAM)を形成した。これらの微小パーツを分散媒の中で撹拌し、ランダムな衝突を起こさせることにより、自己組み立てを行った。組み立て順序については、疎水性相互作用と静電反発力のバランスを、分散媒のpHを変えることにより、制御した。具体的には、pH=6.5程度では、単分子膜間には疎水性相互作用が働き結合が生じるが、単分子膜の形成されていないシリコン表面は帯電するため反発しあう。pH=2.0程度に下げると、シリコン表面の電荷が消失し、シリコン表面同士も結合するようになる。この手法を用いて、順序を付けなければ組立たない、鎖状の微細構造の組み立てに成功した。微小パーツ間の結合力を、定量的に評価するための計測システムを開発した。結合力の検出には、厚さ300nm、長さ350ミクロンの力計測カンチレバーを開発した。これは、サブnNの分解能を持ち、液体中で計測が可能である。このシステムを用いて、微小パーツの結合力を評価した結果、微小パーツ間の結合力が100pN/um^2程度であること、またpHを変えることで結合力が変化していることを確認した。
  • Ministry of Education, Culture, Sports, Science and Technology：Grants-in-Aid for Scientific Research(基盤研究(C))
    Date (from‐to) : 2002 -2004 
    Author : Katsumi FUKUDA; Yasumasa ICHIKAWA; Kiyoshi MATSUMOTO; Isao SHIIMOYAMA; Kazunori HOSHINO
     
    This project is on a fabrication method of nano-scale optical elements using micro contact printing (uCP). Alkyl silane molecules were coated on poly(dimethylsyloxane) (PDMS) stamps with nano- to micro-patterns, and transferred the molecules onto a glass wafer to form a self-assembled monolayer (SAM). Then, the molecules were labeled by fluorescent molecules to enhance optical properties. We used PDMS as a material of the stamps. The patterns of the stamps were transferred from silicon molds, which were fabricated with isotropic etching or electron beam (EB) direct lithography.Firstly, stamps with micro-scale lines and spaces were used to confirm the feasibility of SAM patterning. We coated Aminopropyltriethoxysilane (APTES), which has amino group at its terminal, on the PDMS stamps, and pressed the stamp onto glass wafer. The patterned APTES were labeled by the fluorescent dye molecules (FITC), and observed with fluorescent microscope. The pattern was evaluated by comparing the line width of the stamps and the patterned APTES. For suitable patterning, the pressing time and pressure were found to be 15 seconds and 20 grams, respectively.Secondly, nano-scale optical elements were fabricated. The FITC itself was used as an optical element. Combining the nano-scale patterning of APTES and the FITC labeling, we successfully achieved to fabricate nano-scale optical element. Using PDMS stamps of an illustration, which was drawn with sub-micron lines, APTES was patterned on a glass wafer. The FITC were bound to the patterned APTES. We successfully observed that the fluorescent molecules were surely patterned along the APTES with nano-order resolution, and confirmed that the fluorescent molecules work as nano-scale optical elements.
  • Ministry of Education, Culture, Sports, Science and Technology：Grants-in-Aid for Scientific Research(基盤研究(A))
    Date (from‐to) : 2001 -2004 
    Author : Isao SHIMOYAMA; Kazunori HOSHINO; Kiyoshi MATSUMOTO
     
    In this research, we worked on techniques to integrate polymers, organic semiconductors and proteins into micro electro mechanical systems.We introduced a patterning method for organic LEDs. We patterned the OLED layers by pressing the layer with a micro edges fabricated on a silicon wafer. This enabled us to fabricate 30-micro-meter-wide LED stripe arrays. We also fabricate an OLED on a released silicon microstructure.We fabricated a vertical organic transistor. It was designed as a current driver for OLEDs. Since it has a vertical structure, it is suitable to be arranged on/under an OLED. We report a biomolecular image sensor using a retinal membrane protein. To fabricate the photoreceptor array, a bR-patterning method with electro-deposition and surface modification was developed. An image sensor, which consists of an 8x8 array of 1-millimeter square bR photoreceptors, was fabricated. It was demonstrated that the image sensor detected a gradual image and black and white images.We propose a tactile sensor consisting of standing 300 nm-thick piezoresistive cantilevers embedded in PDMS. The sensor detects the shear stress applied on its surface. We applied the force of 0 [N] to 20 [N] in the X,Y,and Z directions to the sensor. The sensor showed a good linearity and high sensitivity in X-axis.
  • Ministry of Education, Culture, Sports, Science and Technology：Grants-in-Aid for Scientific Research(基盤研究(A))
    Date (from‐to) : 2001 -2004 
    Author : Isao SHIMOYAMA; Kazunori HOSHINO; Takashi YASUDA; Kiyoshi MATSUMOTO
     
    In this project, we researched on the transmissive multi-view stereoscopic display. There is a trade-off between the resolution and the number of images in existing multi-view stereoscopic displays. In order to solve this problem, we propose the way of projecting time-series pixel data into the discrete directions by scanning micromirrors. As the number of the view angles depends on the number of pixel data projected in one cycle of the scan, the resolution and the number of the view angles can be independently increased. In the system using reflective micromirror array like a DMD(Digital Micromirror Device), the mirror array and the light source are generally placed opposite because of a certain length of the light path. On the other hand, as the ray from the underneath display comes through upwards by being reflected twice in our method, the stereoscopic display can be made up thinly and compactly by mounting this array on the 2-D displays.We designed and fabricated the micromirrors actuated by combination of external magnetic force and Lorentz force. The mirror surface is 400 x 500 μm^2, and the thickness is 20 μm. We confirmed the principle of the multi-view display by scanning the laser beam which was reflected by a pair of micromirrors, a fixed mirror and a vibrating mirror. Next, Fabricated micromirrors, microlens array and an LED matrix were integrated into a prototype of the transmissive multi-view stereoscopic display. The relationship between the view angle and the brightness was measured on some conditions. The high feasibility of the multi-view stereoscopic display was proved from these relationships. As both the resolution and the number of the view angles can be increased in our method, a thin multi-view stereoscopic display can be made by integrating this prototype on a large scale.
  • Ministry of Education, Culture, Sports, Science and Technology：Grants-in-Aid for Scientific Research(基盤研究(C))
    Date (from‐to) : 2002 -2003 
    Author : Yasumasa ICHIKAWA; Katsumi FUKUDA; Kiyoshi MATSUMOTO; Isao SHIMOYAMA; Kazunori HOSHINO
     
    In the research program for 2 years, we had 3 projects which are the trial manufacture of the channel for the calibration, the development of the flow sensor chip and the performance evaluation of the micro channel which built in the nano flow sensor. With this plan, we have constructed the micro channels which have 100icro meter width and 80micro meter dips with the venture structure, and the performance evaluation was done in 2002. We have some result for the developments of micro fluidics sensor in the experimental research such as the dissolution of the gas to the liquid phase can not be disregarded in the pump and the pressure gage using the difference in gas-liquid interface, methods of the micro channel design and so on. In 2003, we have constructed the micro-pumps with the electro osmotic flow and we have obtained the basic knowledge on the carbon nano-tube flow sensor. We succeeded in carrying out the experiment in which the carbon nano-tube is made to grow in the micro structure on silicon wafer, and bridged with the nanotube between the micro structures interval of about 10micro meter.The possibility of flow velocity distribution in the sub micron region was shown by these experiments.
  • Ministry of Education, Culture, Sports, Science and Technology：Grants-in-Aid for Scientific Research(基盤研究(B))
    Date (from‐to) : 2001 -2003 
    Author : Kiyoshi MATSUMOTO; Keiko ABE; Kimitaka KAGA; Masayuki NAKAO
     
    The objective of the present study is to establish design guidelines for developing neural prosthesis that restores lost sensory functions due to disorders of sensory cells or pathways. The achievements of the study are summarized as follows. First, we developed an experimental animal model of the auditory brainstem implant (ABI) that directly stimulates the cochlear nucleus in the brainstem to restore the hearing of deaf patients who had their auditory nerves removed. The model included a surface microelectrode array for auditory cortical recording and a spike microelectrode arrray for the microstimulation in the cochlear nucleus. Second, using the ABI model of rats, we demonstrated that the cochlear nuclear microstirnulation could evoke spatio-temporal neural activity in the auditory cortex and the proper stimulation could take after the pure-tone-evoked activation, suggesting that the stimulation could induce a pitch and intensity sensation and thus substantially verifying the capability of ABI Third, we proposed and verified "the multiple gating stimulation," which can selectively activate nerves placing in between electrodes. The technique broadly generated action potentials with "the cathodic sourte electrodes," and simultaneously blocked unnecessary propagation with "the anodic gate electrodes," resulting in selective propagation in between electrodes. We demonstrated the feasibility via simulations with nerve equations and in vivo experiments of rat spinal cord stimulation Forth, our cortical auditory evoked potential (AEP) mapping demonstrated that the rat auditory cortex is divided into the multiple auditory fields, which represent the information of test tones in their respective manner. Fifth, we combined theoretical and experimental works to better understand the spatio-tempomal neuronal activation. We interpreted the contradictory MLR neurogenesis and their various morphologies particularly within early latency, and finally suggested that they were determined by combination of three activities: cortical firing activities, cortical synaptic activities, and other activities far from cortex.
  • Ministry of Education, Culture, Sports, Science and Technology：Grants-in-Aid for Scientific Research(特定領域研究(B), 特定領域研究)
    Date (from‐to) : 2001 -2003 
    Author : Masayuki NAKAO; Mamoru MITSUISHI; Kiyoshi MATSUMOTO
     
    The purpose of this research is establishing the technology to create the 3-dimensional fine structures for micro-chemo-mechatronics with semiconductor processing technology and machining technology.In addition to the conventional MEMS technique and chemical modification technology, mechanical ultra-fine processing technology, such as electrolysis polish, electrical discharge machining, beam deposition, assembly, bonding, embossing, injection molding, and so on is used to create microchemistry instruments equipped with the 3-dimensional fine structures for chemical analysis. In this research, we classified micro/nano structure into needlelike, tubular, and channel-like structure as the following items.Needlelike structure : The electron beam depositing (EBD) method which generates carbon nano-wire using the beam of a scanning electron microscope was developed as manufacturing technology of the nano meter scaled needlelike structure. Using this needlelike structure, handing tool of DNA and scattering probe for near-field optical microscope was developed. Furthermore, conductive control of an EBD probe was tried for the application to a micro electrode, micro sensor, etc. In order to generate crystalline graphite structure instead of amorphous EBD, we arranged the source feeder of carbon, a catalyst, and the heating equipment for activation of the catalyst in an electron microscope. As the result, the carbon deposition considered to be crystalline was generable.Tubular structure : Research which processes a micro glass pipe using focused ion beam and produces tubular structure has been done. As an example of application, micro pipet which performs fixed quantity dispensing by preparing hydrophilic area of the fixed volume of pico liter order in the interior of the pipet was developed. And also, the system which generates droplet on a substrate with the combination of the micro pipet verticaly drived by the piezo-electric device, and the substrate with controlled hydrophilicity was developed.Channel-like structure : The mechanical processing method for manufacturing glass channel chips mainly manufactured by the chemical technique such as a wet or dry etching at this stage, at high speed and low cost has been developed for mass-production of micro chemical analysis instruments. For example, processing method which coat a substrate with the glass flit by an injector, form channels, sinters and produces a glass chip was tried. Furthermore, in order to treat the reagent which makes glass corrode, and the reaction which generates excessive heat and pressure, the metal micro-reactor excellent in heat transfer and shock resistance was developed. It was shown that combining the cutting method for formation of the groove, and the bonding technology of the cover by the YAG laser-welding method, the multilayer chip made from stainless steel with 400 micrometers width channels is producible.
  • Ministry of Education, Culture, Sports, Science and Technology：Grants-in-Aid for Scientific Research(基盤研究(B))
    Date (from‐to) : 2001 -2002 
    Author : Kiyoshi MATSUMOTO; Takeshi YONEYAMA; Shuji TANAKA; Masayuki NAKAO
     
    (a) hologram diffraction grating, (b) immunoassay chip, c disposable contact lenses, etc. were set as the candidate for a trial production, this research considered synthetically the principle of a new transfer process^ Equality of the material of a transferred material or mold material, the fabrication method of mold, optimization of process conditions, etc. For injection molding of hologram diffraction gratings, the equipment which can monitor the state of internal plastics by the temperature sensor and the heat flux sensor and pressurize partially by the piezoelectric device was developed. It was shown that injection molding of the 1 micrometer pitched diffraction grating with a depth of 150nm could be carried out to plastics using this equipment.Moreover, the process which transfers to hard, material using a sacrifice layer mask was developed. Plastics are applied on glass and form is transferred from a mold to this. Next, the fast atom beam performs anisotropic etching. It was shown that the form of the original mold could be transferred on glass by equalizing the etching rate of plastics and glass. Furthermore, small intelligence mold which will grasp the state in the mold cavity of injection molding on real time and can control the conditions in a mold cavity actively and locally according to it was developed. Two small heaters which beat a mold cavity locally, three heat flux sensors which measure the local heat flux in a mold cavity, force sensor and displacement sensor which measure mold cavity internal pressure and capacity were embedded to the intelligence mold with a size of 98x98xll7mm. And it was shown that the flatness of 30xl5x6mm and a box type cast with a thickness of 1mm could be raised from 20 micrometers to 3 micrometers by partial heat flux central etc.Moreover, in order to heat and cool a narrower area at pinpoint, the phi1.0mm small heater and the phi1.0mm double pipe waterway cooler were made as an experiment and examined. It was shown that 1 degree C of mold cavity surface temperature could be locally lowered with aphi1.0mm double pipe waterway cooler as a result of the preliminary experiment.
  • 文部科学省：科学研究費補助金(萌芽的研究, 萌芽研究)
    Date (from‐to) : 2001 -2002 
    Author : 中尾 政之; 松本 潔
     
    本研究の目的は、電子ビーム堆積(EBD)法で作製したナノワイヤを用いてメゾスコピックサイズの3次元構造体を作製する技術を確立することである。またさらにその構造体を用いた様々な機能素子を製作し、その可能性を探索することである。対象とする機能素子は、3次元LSI、量子細線を用いた量子効果デバイス、微小コイルを応用した磁気デバイスなどナノワイヤを電子配線的に用いる素子と、光の波長と同程度以下のフォトニック構造体などナノワイヤを光学物質として用いる素子である。電子配線的な応用については、平成13年度の研究結果によって、EBDの体積抵抗率は約100Ωmと高いことが分かったことから、平成14年度ではこれを改質する研究を行った。Ni系触媒表面でEBDの生成を行い生成に問題がないことは確認できたものの結晶構造に顕著な差異は見られなかった。光学的な素子については、AFM用のカンチレバーに集束イオンビームを用いて光の波長程度の開口を形成し、開口部にEBD法を用いて近接場光学顕微鏡の散乱プローブを作製した。φ10nm、長さ1μmのアモルファスカーボンの針をもつ散乱プローブを製作し、φ20nmのビーズとφ200nmのビーズが混在した試料の観察を行った結果、従来の散乱プローブでは存られなかった、φ200nmのビーズの近傍にあるφ20nmのビーズの光学像を得ることができ、製作した散乱プローブが高アスペクト比物体の高分解能観察に有用であることを示した。
  • Ministry of Education, Culture, Sports, Science and Technology：Grants-in-Aid for Scientific Research(基盤研究(B))
    Date (from‐to) : 2000 -2002 
    Author : 畑村 洋太郎; Masayuki NAKAO; 中尾 政之; Kimitaka KAGA; Kiyoshi MATSUMOTO; Yotaro HATAMURA
     
    This project purposes to establish design methodology for auditory prostheses for patients having some neural impairment. We especially focused on auditory systems and accomplished following major achievements : (1) Development of an animal model for a brainstem implant system, which includes the surface microelectrode for anditory cortical recording and a spike microelectrode array for cochlear nuclear brainstem stimulation ; (2) Validation of brainstem stimulation for pitch and intensity sensation, based on investigation of auditory cortical functional organization ; and (3) Development of "the multiple gating stimulation," which can selectively activate nerves placing in between electrodes.The surface microelectrode array epi-cortically measures high-resolution auditory cortical signals. The array employs a polyimide substrate so as to conform curved and pulsating cortical surface. The array has 70 recording points in a 2-mm-square area. The spike microelectrode array files 16 tungsten microelectrodes in a grid form with 400-□m spacing.We first investigate pure-tone-evoked auditoly cortical responses and auditory cortical organizations based on the responses. The responses represent characteristic spatio-temporal patterns depending on frequency and intensity of the stimuli. The spike microelectrode array, then, stimulates the brainstem cochlear nucleus, and the evoked responses have good agreement with acoustically evoked responses. Moreover, our results strongly suggest pitch and intensity sensation is possible when an adequate position at a brainstem is stimulated at an adequate current intensity.We demonstrate the feasibility of the gating stimulation via simulations with nerve equations and in vivo experiments of rat spinal cord stimulation. The technique broadly generates action potentials with "the cathodic source electrodes," and simultaneously blocks unnecessary propagation with "the anodic gate electrodes," resulting in selective propagation in between electrodes.
  • Ministry of Education, Culture, Sports, Science and Technology：Grants-in-Aid for Scientific Research(基盤研究(A))
    Date (from‐to) : 2000 -2002 
    Author : Masayuki NAKAO; Takatsugu TAKEUCHI; Yotaro HATAMURA; Kiyoshi MATSUMOTO; Masao WASHIZU; Shinji TANAKA
     
    In this research, fabrication technology of the 3-dimensional nano structure was developed for the purpose of making detailed the tool which is used for fixing, operating and analyzing a minute living body substance to 10nm order We classified the 3-dimensional nano structure into shape of needlelike, tubular and granular structure.To febrieate needlelihe structures, we developed the electron beam depositing (EBD) method which make carbon deposit using the beam of the scanning electron microscope. It was shown that using the φ20nm key-like probe forme at the tip of a glass needle by the EBD method, a part of single lambda-DNA molecule elongated on the hydrophobic substrate is reroverable. Moreover, by the EBD method, the needle of nano meter size was formed at the tip of a cantilever of an atomic foroe microscope, and this was applied to the scattering probe of a scanning near-field optical microscop. As a result of observing the sample in which the φ20nm bead and the φ200nm bead were intermingled, the scattening probe, which was φ10nm needle of amorphous carbon with a length of 1 micrometer, could obtain the optical image of the φ20nm bead near the φ200nm bead that was not obtained by the conventional scattering probe.To fabricate tubular structures, we used detailed glass pipe and focused ion beam. Tubular structure of about 500nm of bores can be produced. Moreover, the system which generates the granular fine structure, using this tubular structure further was developed. The above-mentioned tubular structure (detailed pipet) was driven up and down using the piezo-electric element, and the system which form and gelates about φ1 micrometer droplets on a glass substrate was developed. Moreover, it was shown that a gnen is enclosed which this droplets and it can apply to the capsule for the transformations of a plant cell.
  • 文部科学省：科学研究費補助金(萌芽的研究)
    Date (from‐to) : 2000 -2001 
    Author : 松本 潔; 松本 洋一郎; 中尾 政之; 畑村 洋太郎; 高木 周
     
    平成13年度は、ハードウエアの製作プロセスを確立し、さらにナノチャネルを備えた実験装置を試作して、実際に流体を流して理論解析のデータと比較を行った。実験ハードウエアは、ガラスの基板上に作成した。基板上には、ナノチャネル部、導入チャネル部、圧力検出部が配置される。ナノチャネル部は、電子線描画装置を用いて幅数百nmのパタンを描き、高速原子線によるエッチングで深さ方向の加工を行った。導入チャネル部、圧力検出部の加工には、数μmの微細シリカ粒子をぶつけて加工を行うパウダービームを用いた。加工した基板とカバーガラスの接合は、表面を親水性処理をした後、フッ酸による接合を行った。実験装置では、基板外部に設置したシリンジポンプを用いてチャネルに流体を流した。圧力の測定は、基板上に液だめを設け、液だめのカバーが圧力により変形するときの歪みを検出した。圧力降下を防ぐため、この圧力検出部は基板上のナノチャネルの直前に設けてある。幅470nm、深さ170nm、長さ5μmのナノチャネルを500本平行に有する流路を作成し、さらに流量を10、20、30μl/hと変化させて特性評価を行った。30μl/hの流量時、1750kPaの圧力損失であった。理論計算による圧力損失はで515kPaであり、ほぼ3倍の値となった。本研究で、ナノチャネルの作成プロセスの確立を行うことが出来た。チャネル内の流動特性は、圧力損失のこの領域でのオーダーは判ったが、まだ理論値とは3倍程度の開きがある。これは、チャネルが小さくなったことによる壁面の濡れ性の影響、水のクラスターの影響によるものと考えられる。実験装置としては、ポンプ、センサなどが、微小流量を扱うのには最適なものとは言えない。特に流量の計測は難しく、微小流量を精密に計測するセンサの開発が必須である。
  • Ministry of Education, Culture, Sports, Science and Technology：Grants-in-Aid for Scientific Research(基盤研究(B))
    Date (from‐to) : 1999 -2001 
    Author : Masao WASHIZU; Masayuki NAKAO; Hiroyuki KABATA; Hidetoshi KOTERA; Yotaro HATAMURA; Kiyoshi MATSUMOTO
     
    The purpose of this research is to develop novel methods and tools for mechanical manipulation of chromosomes, to stretch DNA fibers out of a chromosome, to analyze the structure of a chromosome, to locate a specific gene on the DNA strand, and to dissect or modify DNA (micro surgery of chromosomes). The results obtained are summarized as below.1) A microfabricated device is developed, which enables on-demand supply of protease and its inhibitor to the object without applying excessive hydrodynamic stress. Using the device, a chromosome of higher species which appears in the division cycle of a cell is partially decomposed, and with the use of laser-manipulation methods, it has been shown that a continuous DNA fiber can be pulled out of a chromosome. It is also shown that local heating by laser is effective in partially decomposing a chromosome.2) A method is developed to handle total chromosome of a yeast cell in a batch. The cytoskeleton of the cell is reinforced using molecular linkers to form a cage in which DNA is contained, cell membrane ruptured by adding surfactants, and FISH (Fluorescent in situ Hybridization) protocol is applied. Then the cell is placed on a solid surface, the cage structure partially destroyed, and using electroosmotic flow, DNA fiber is pulled out and stretched.3) Electron Beam Deposition (EBD) is used to grow a tiny probe (several ten nm in diameter) on the tip of a glass needle. It is experimentally shown that aimed portion can be dissected and picked up from DNA fibers immobilized on a hydrophobic surface. The devices and methods developed in this research will be a powerful tools for bio-nanotechnology, which will bring about a new dimension of "spatial resolution" to conventional test-tube based biochemistry.
  • Ministry of Education, Culture, Sports, Science and Technology：Grants-in-Aid for Scientific Research(基盤研究(A))
    Date (from‐to) : 1998 -2000 
    Author : Masayuki NAKAO; Takeshi YONEYAMA; Kiyoshi MATSUMOTO; Yotaro HATAMURA
     
    This research introduces a micro mechanical reproduction process, which duplicates a 3D sub-um features. The process has three sub-processes : fabricating a metal/glass mold using conventional photolithography or cutting, duplicating the structures on a resin replica from the mold and duplicating the structures on a product from the replica. Concretely, we tried (a) near-field optical lithography, (b) sacrificially masked etching (c) mold injection and press. Near-field optical lithography fabricates a quartz mold using electron beam lithography and fast atom beam etching. The mold has 3D micro structures, which is stumped to an acetylcellulose replica. The replica is placed on a prism which total reflects the 442um wave-length He-Cd laser. On the surface of the replica, a near-field light is emitted, exposing the photo-resisit. The process could expose a 50nm line and space pattern, but reveals the exposure is influenced by polarization or direction of light. Sacrificial masked etching process fabricates a Ni-P plated Al-based mold. The mold is pressed on a spin coated silicone, reproducing 3D micro structure. The silicone will works as a sacrifice mask and reproduces the structures using fastatom beam etching. The process could reproduce a diffraction grating with 1 um pitched, 1um deep and triangular grooves. Mold injection and press process fabricates a metal mold and reproduces 3D microstructures with a motor-driven injection machine. The mold is pressed using a piezo element just after injecting and can duplicate 1um pithed and 1um deep grooves.
  • 文部科学省：科学研究費補助金(萌芽的研究)
    Date (from‐to) : 1999 -1999 
    Author : 中尾 政之; 松本 潔; 畑村 洋太郎
     
    本研究の目的は、CVD膜とAFMを用いてハードディスク上の潤滑液の存在状態を観察する方法を確立することである。さらに潤滑液が耐磨耗性に及ぼすメカニズムを解明するとともに、耐摩耗性の優れた新しい潤滑液を提案することを目指す。具体的な観察方法として、(1)ハードディスクの表面にカーボン系のCVD膜を厚み2nm程度で成膜して潤滑液を固定し、その膜の上からAFMで観察する方法、(2)フッ素を混ぜたCVD膜をAFM針の表面に薄く成膜して、そのCVD膜と潤滑液との親和力の違いから(この場合は反発する)、AMFで潤滑液の位置を観察する方法、を試みた。前者の方法では、潤滑膜を加熱すると、ボンド(カーボン膜と強固に結合していてフレオンに浸しても溶出しない潤滑液分子)は単層膜が一面に広がるだけでなく、直径30nm程度の島に分散して存在し、その島は分子量が大きくなるほど顕著に大きくなること、潤滑液で浸けてもさらに付着しない、全面が潤滑剤で覆われた状態だと、摺動による耐摩耗性が優れること、モバイル(ボンドではない可動分子)は蒸発するためか観察できないこと、などがわかった。また、後者の方法では、前者と同様な島が観察されるが、モバイルとボンドとの差異が観察できないこと、などがわかった。
  • 文部科学省：科学研究費補助金(奨励研究(A))
    Date (from‐to) : 1997 -1998 
    Author : 松本 潔
     
    平成10年度は、システム安定限界の解析、最適な加工誤差の収束条件の検討、平面研削システムの特性測定、ネガティブコンプライアシスによる加工実験を行い、本システム評価を行った。研削システムおよびアクティブカセンサのコンプライアンスをそれぞれCs、Ca、また加工コンプライアンスをCmとする。Csは研削システムに固有であり、またCmは(切り込み量)/(研削力)で定義されるものとする。解析により、アクティブカセンサのコシプライアシスCaが-(Cs+Cm)
  • Ministry of Education, Culture, Sports, Science and Technology：Grants-in-Aid for Scientific Research(基盤研究(B))
    Date (from‐to) : 1997 -1998 
    Author : Yotaro HATAMURA; Takeshi YONEYAMA; Kiyoshi MATUMOTO; Masayuki NAKAO
     
    The research introduces a desk-top manufacturing system for micro-machines. It has a miniature machine to cut micro parts ; it needs low environmental load and low working energy. We designed it under the following design strategy. (a) The miniature machines are concentrated around a fixed workpiece ; the machines are transferred to the next process. (b) The designed mechanism in the miniature machines is not a similar and miniaturized mechanism of macro and conventional ones. We realized a "micro machine shop" which sizes a 200 mm cube, and which mills five faces of the workpiece of a 1 mm cube. According to the strategy, the shop concentrates 4 machines, 1 manipulator and 1 microscope around the workpiece, and employs an air turbine besides a rotation motor, a voice coil motor held by an elastically deformed plates besides a ball screw held by a linear ball guide. We evaluated it through micro-milling of metals or plastics. (1) Both cooling of a column and a table using adiabatic expansion of the air and position feedback control with strain gauges on the elastically deformed plates progress the table movement to a 0.05 mum resolution and a 1 mum repeatability. (2) Rigidity of the table under position controlling is not rigid to 10 mN/mum just after force working, but later becomes a infinity to mill precisely. (3) Square-bar-shaped endmills made of carbides or diamond can micro-mill the workpiece as well as micro-mill. But the home-made or market-available endmills are not thin to 50 mum in diameter, and not sharp to 0.1 mum in edge radius ; we can not cut a groove such as 30 mum wide. The system is a promising micro-factory for an one-item production such as cutting an electrode or a package during surgery operation, or cutting the mold of a contact-lens or an accessory in a shop.

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